Microelectronic Research Laboratory
Department of Electrical and Computer Engineering
University of Louisiana at Lafayette
Microelectronic Research Laboratory is a research facility in the Electrical and Computer Engineering at UL Lafayette. There is more than $500,000 worth of R&D equipment to support fabrication of magnetic recording sensors and devices. It is equipment with a Class 100 Clean room for 4" wafer fabrication line of thin film sensor and devices.
A list of some of the equipment available in the Microelectronic Research Laboratory is provided.
- Vacuum Deposition System and Thermal Evaporation System
- Low Temperature (Corona Discharge) Oxidation Furnace
- Thermocouple Gauge Controller Varian Model 815-L5700-301
- Temperature Controllers with integral and derivative control (PID)
- Vertical Laminar Flow work station Class-100
- Four Point Probes Semi-Automatic Veeco FPP-5000
- Scanning electron microscope
- Class 100 Clean Room
- DC/RF Sputtering System
- Sub-micron Mask Aligner
- Spin coater, Wafer Srciber, Model 2800 Semiconductor Equip.
- Tencor Model P-10 Long Scan Surface Profiler
- Hot-plate and several furnaces
- Ultrasonic Wire Bonding System
- HP4156A Precision Semiconductor Analyzer
- Submicron Signaton Probe Station S-251
- HP 4192A LF Impedance Analyzer
- HP 35665A Dynamic Signal Analyzer
- SPARC station 5 work station, Model 85 with 85 MHZ SPARC II processor 20-inch color monitor, 32-Mbte, 1.05 Gbyte.
- TSUPREM-4 Software: 3-D VLSI processing simulation software package, MEDICI : Device simulation software package
- Several IBM PCS with GPIB Interface cards
- LabVIEW Software
- PC fabrication